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2吋藍寶石基底板
2-inch Sapphire Substrates Item Specification
#Sapphire#Wafer#2-inch#Substrates#藍寶石#基底板#2吋
2-inch Sapphire Substrates
|
Item
|
Specification
|
Unit
|
| Material |
>99.99% Single Crystal Al2O3 |
|
| Orientation |
C-axis[0001] tiled M-axis 0.2 ± 0.1°
|
Degree
|
| Primary Flat |
A-Axis [11-20] ± 0.2°
|
Degree
|
| Diameter |
50.80 ± 0.15
|
mm
|
| Thickness |
430 ± 15
|
μm
|
| Flat Length |
16 mm ± 0.5
|
mm
|
| TTV |
≦ 10
|
um
|
| Bow |
-10 ~ 0
|
um
|
| Warp |
≦15
|
um
|
| LTV |
≦10
|
um
|
| TIR |
≦10
|
um
|
| Frontside Surface Roughness |
≦10
|
Å
|
| Backside Surface Roughness |
0.8 ≦ Ra ≦1.2
|
um
|
| Wafer Edge |
R-Type
|
|
| Laser Mark |
Front side
|
|
| Package |
25 wafers in one cassette
|
|
| Other specifications are available upon request. | ||
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